Invention Grant
- Patent Title: Top gate thin film transistor and display apparatus including the same
- Patent Title (中): 顶栅薄膜晶体管和包括其的显示装置
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Application No.: US13188215Application Date: 2011-07-21
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Publication No.: US08624240B2Publication Date: 2014-01-07
- Inventor: Ayumu Sato , Hideya Kumomi , Hisato Yabuta , Ryo Hayashi , Yasuyoshi Takai
- Applicant: Ayumu Sato , Hideya Kumomi , Hisato Yabuta , Ryo Hayashi , Yasuyoshi Takai
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Fitzpatrick, Cella, Harper and Scinto
- Priority: JP2010-174234 20100803
- Main IPC: H01L29/786
- IPC: H01L29/786

Abstract:
Provided is a top gate thin film transistor, including on a substrate: a source electrode layer; a drain electrode layer; an oxide semiconductor layer; a gate insulating layer; a gate electrode layer including an amorphous oxide semiconductor containing at least one kind of element selected from among In, Ga, Zn, and Sn; and a protective layer containing hydrogen, in which: the gate insulating layer is formed on a channel region of the oxide semiconductor layer; the gate electrode layer is formed on the gate insulating layer; and the protective layer is formed on the gate electrode layer.
Public/Granted literature
- US20120032173A1 TOP GATE THIN FILM TRANSISTOR AND DISPLAY APPARATUS INCLUDING THE SAME Public/Granted day:2012-02-09
Information query
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