Invention Grant
US08624395B2 Redundancy design with electro-migration immunity and method of manufacture 有权
具有电迁移免疫力的冗余设计和制造方法

Redundancy design with electro-migration immunity and method of manufacture
Abstract:
An IC interconnect for high direct current (DC) that is substantially immune to electro-migration (EM) damage, and a method of manufacture of the IC interconnect are provided. A structure includes a cluster-of-via structure at an intersection between inter-level wires. The cluster-of-via structure includes a plurality of vias each of which are filled with a metal and lined with a liner material. At least two adjacent of the vias are in contact with one another and the plurality of vias lowers current loading between the inter-level wires.
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