Invention Grant
US08624395B2 Redundancy design with electro-migration immunity and method of manufacture
有权
具有电迁移免疫力的冗余设计和制造方法
- Patent Title: Redundancy design with electro-migration immunity and method of manufacture
- Patent Title (中): 具有电迁移免疫力的冗余设计和制造方法
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Application No.: US13400900Application Date: 2012-02-21
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Publication No.: US08624395B2Publication Date: 2014-01-07
- Inventor: Louis L. Hsu , Conal E. Murray , Ping-Chuan Wang , Chih-Chao Yang
- Applicant: Louis L. Hsu , Conal E. Murray , Ping-Chuan Wang , Chih-Chao Yang
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Roberts Mlotkowski Safran & Cole, P.C.
- Agent Katherine Brown
- Main IPC: H01L23/48
- IPC: H01L23/48

Abstract:
An IC interconnect for high direct current (DC) that is substantially immune to electro-migration (EM) damage, and a method of manufacture of the IC interconnect are provided. A structure includes a cluster-of-via structure at an intersection between inter-level wires. The cluster-of-via structure includes a plurality of vias each of which are filled with a metal and lined with a liner material. At least two adjacent of the vias are in contact with one another and the plurality of vias lowers current loading between the inter-level wires.
Public/Granted literature
- US20120161334A1 REDUNDANCY DESIGN WITH ELECTRO-MIGRATION IMMUNITY AND METHOD OF MANUFACTURE Public/Granted day:2012-06-28
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