Invention Grant
- Patent Title: Measuring method, arrangement and software product
- Patent Title (中): 测量方法,布置和软件产品
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Application No.: US12083091Application Date: 2006-10-06
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Publication No.: US08624582B2Publication Date: 2014-01-07
- Inventor: Hele Savin , Antti Haarahiltunen , Marko Veli Yli-Koski
- Applicant: Hele Savin , Antti Haarahiltunen , Marko Veli Yli-Koski
- Applicant Address: FI TKK
- Assignee: Teknillinen Korkeakoulu
- Current Assignee: Teknillinen Korkeakoulu
- Current Assignee Address: FI TKK
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: FI20051009 20051007
- International Application: PCT/FI2006/000327 WO 20061006
- International Announcement: WO2007/042606 WO 20070419
- Main IPC: G01R23/20
- IPC: G01R23/20 ; G01R19/00

Abstract:
The invention presents a method for determining the copper concentration of the substrate using the photoconductivity method in a new manner, the method comprising steps in which the photoconductivity property of the substrate is measured for a first time by an arrangement, the surface of the substrate is illuminated by illuminating means emitting photon radiation, the photoconductivity property of the substrate is measured for a second time by an arrangement, and the copper concentration of the substrate is determined from the change between the first and second time of measurement on the basis of the illumination. The invention also presents an arrangement and a software product for determining the copper concentration.
Public/Granted literature
- US20090160431A1 Measuring Method, Arrangement and Software Product Public/Granted day:2009-06-25
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