Invention Grant
US08624686B2 Micromechanical component and method for oscillation excitation of an oscillation element of a micromechanical component 有权
用于微机械部件的振荡元件的振荡激励的微机械部件和方法

  • Patent Title: Micromechanical component and method for oscillation excitation of an oscillation element of a micromechanical component
  • Patent Title (中): 用于微机械部件的振荡元件的振荡激励的微机械部件和方法
  • Application No.: US12733079
    Application Date: 2008-07-02
  • Publication No.: US08624686B2
    Publication Date: 2014-01-07
  • Inventor: Robert Sattler
  • Applicant: Robert Sattler
  • Applicant Address: DE Stuttgart
  • Assignee: Robert Bosch GmbH
  • Current Assignee: Robert Bosch GmbH
  • Current Assignee Address: DE Stuttgart
  • Agency: Kenyon & Kenyon LLP
  • Priority: DE102007037555 20070809
  • International Application: PCT/EP2008/058486 WO 20080702
  • International Announcement: WO2009/019086 WO 20090212
  • Main IPC: H03B5/30
  • IPC: H03B5/30
Micromechanical component and method for oscillation excitation of an oscillation element of a micromechanical component
Abstract:
A micromechanical component and a method for providing the oscillation excitation of an oscillation element of a micromechanical component, the micromechanical component having a frame, which is connected to a carrier substrate by an outer suspension element, in which the frame being tiltable about a first axis and oscillatory about a second axis that is positioned perpendicular to the first axis, and in which the micromechanical component having an oscillation element that is connected to the frame by an inner suspension element, and is tiltable about the second axis, the outer suspension element being provided to be dimensioned in such a way that a first oscillation of the frame about the second axis and a second oscillation of the oscillation element about the second axis have a maximum coupling.
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