Invention Grant
- Patent Title: Surface acoustic wave device, oscillator, module apparatus
- Patent Title (中): 表面声波装置，振荡器，模块装置
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Application No.: US12977525Application Date: 2010-12-23
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Publication No.: US08624690B2Publication Date: 2014-01-07
- Inventor: Shuichi Kawano , Masashi Fujioka
- Applicant: Shuichi Kawano , Masashi Fujioka
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2009-297056 20091228; JP2010-028615 20100212; JP2010-038404 20100224
- Main IPC: H03H9/64
- IPC: H03H9/64 ; H03H9/25 ; H03B5/32
Abstract:
A surface acoustic wave device includes: a sapphire substrate having a C-plane main surface; an aluminum nitride film which is formed on the main surface of the sapphire substrate; comb-like electrodes which are formed on the surface of the aluminum nitride film to excite surface acoustic waves; and a silicon dioxide film which covers the comb-like electrodes and the surface of the aluminum nitride film.
Public/Granted literature
- US20110156840A1 SURFACE ACOUSTIC WAVE DEVICE, OSCILLATOR, MODULE APPARATUS Public/Granted day:2011-06-30
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