Invention Grant
- Patent Title: Exposure apparatus and method of manufacturing device
- Patent Title (中): 曝光装置及其制造方法
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Application No.: US12141216Application Date: 2008-06-18
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Publication No.: US08625069B2Publication Date: 2014-01-07
- Inventor: Nobuhiko Yabu , Tadao Nakamura
- Applicant: Nobuhiko Yabu , Tadao Nakamura
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A., Inc. IP Division
- Priority: JP2007-165312 20070622
- Main IPC: G03B27/68
- IPC: G03B27/68 ; G03B27/52

Abstract:
An exposure apparatus the present invention comprises: an illumination optical system configured to illuminate an illumination area on an original with light from a light source; a projection optical system configured to project a pattern of the original onto a substrate; a first stage configured to hold the original; a second stage configured to hold the substrate; and a controller configured to control driving of at least one of the first stage, the second stage, and an optical element which forms the projection optical system so as to reduce variations in imaging characteristics of the projection optical system, based on a dependence of a transmittance of the pattern on a position in the illumination area.
Public/Granted literature
- US20080316447A1 EXPOSURE APPARATUS AND METHOD OF MANUFACTURING DEVICE Public/Granted day:2008-12-25
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