Invention Grant
- Patent Title: System and methods related to generating electromagnetic radiation interference patterns
- Patent Title (中): 与产生电磁辐射干扰图相关的系统和方法
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Application No.: US12959128Application Date: 2010-12-02
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Publication No.: US08625075B2Publication Date: 2014-01-07
- Inventor: Karl K. Berggren , Hasan Korre , Corey P. Fucetola
- Applicant: Karl K. Berggren , Hasan Korre , Corey P. Fucetola
- Applicant Address: US MA Cambridge
- Assignee: Massachusetts Institute of Technology
- Current Assignee: Massachusetts Institute of Technology
- Current Assignee Address: US MA Cambridge
- Agency: Wolf, Greenfield & Sacks, P.C.
- Main IPC: G03B27/32
- IPC: G03B27/32 ; G03B27/42 ; G03B27/54
Abstract:
Systems and methods related to the generation of interference patterns using electromagnetic radiation are generally described. Some embodiments are directed to the use of such systems and methods to perform interference lithography.
Public/Granted literature
- US20120099090A1 SYSTEM AND METHODS RELATED TO GENERATING ELECTROMEGNETIC RADIATION INTERFERENCE PATTERNS Public/Granted day:2012-04-26
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