Invention Grant
- Patent Title: Positioning apparatus, exposure apparatus, and device manufacturing method
- Patent Title (中): 定位装置，曝光装置和装置制造方法
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Application No.: US12984516Application Date: 2011-01-04
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Publication No.: US08625077B2Publication Date: 2014-01-07
- Inventor: Hirohito Ito
- Applicant: Hirohito Ito
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A., Inc. IP Division
- Priority: JP2010-001197 20100106
- Main IPC: G03B27/58
- IPC: G03B27/58 ; G03B27/62
Abstract:
A positioning apparatus according to the present invention includes: a tabletop having a plane; a plurality of actuators configured to be driven in a direction perpendicular to the plane to move the tabletop; and a control unit configured to measure a frequency response of the tabletop and, when a peak is detected at the resonance frequency of elastic vibration of the tabletop, adjust the thrust distribution ratio for the plurality of actuators to reduce the peak.
Public/Granted literature
- US20110164230A1 POSITIONING APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD Public/Granted day:2011-07-07
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