Invention Grant
- Patent Title: Illumination design for lens heating mitigation
- Patent Title (中): 镜头加热减轻的照明设计
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Application No.: US13080666Application Date: 2011-04-06
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Publication No.: US08625078B2Publication Date: 2014-01-07
- Inventor: Jianming Zhou , Scott Light , Dan Millward , Yuan He , Kaveri Jain , Lijing Gou , Zishu Zhang , Anton DeVilliers , Michael Hyatt
- Applicant: Jianming Zhou , Scott Light , Dan Millward , Yuan He , Kaveri Jain , Lijing Gou , Zishu Zhang , Anton DeVilliers , Michael Hyatt
- Applicant Address: TW Kueishan, Tao-Yuan Hsien
- Assignee: Nanya Technology Corp.
- Current Assignee: Nanya Technology Corp.
- Current Assignee Address: TW Kueishan, Tao-Yuan Hsien
- Agent Winston Hsu; Scott Margo
- Main IPC: G03B27/32
- IPC: G03B27/32 ; G03B27/52
Abstract:
A method for reducing the effects of lens heating of a lens in an imaging process includes determining heat load locations on the lens according to an illumination source and a reticle design, obtaining a lens response characterization according to the heat load locations, and utilizing the heat load locations and the lens response characterization to generate a lens heating sensitivity map.
Public/Granted literature
- US20120257177A1 ILLUMINATION DESIGN FOR LENS HEATING MITIGATION Public/Granted day:2012-10-11
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