Invention Grant
- Patent Title: Regenerative amplifier, laser apparatus, and extreme ultraviolet light generation system
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Application No.: US13121319Application Date: 2011-03-07
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Publication No.: US08625190B2Publication Date: 2014-01-07
- Inventor: Krysztof Nowak , Takashi Suganuma , Osamu Wakabayashi
- Applicant: Krysztof Nowak , Takashi Suganuma , Osamu Wakabayashi
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Agency: McDermott Will & Emery LLP
- International Application: PCT/JP2011/055861 WO 20110307
- International Announcement: WO2011/115025 WO 20110922
- Main IPC: H01S3/05
- IPC: H01S3/05

Abstract:
A regenerative amplifier according to one aspect of this disclosure is used in combination with a laser device, and the regenerative amplifier may include: a pair of resonator mirrors constituting an optical resonator; a slab amplifier provided between the pair of the resonator mirrors for amplifying a laser beam with a predetermined wavelength outputted from the laser device; and an optical system disposed to configure a multipass optical path along which the laser beam is reciprocated inside the slab amplifier, the optical system transferring an optical image of the laser beam at a first position as an optical image of the laser beam at a second position.
Public/Granted literature
- US08749876B2 Regenerative amplifier, laser apparatus, and extreme ultraviolet light generation system Public/Granted day:2014-06-10
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