Invention Grant
- Patent Title: MEMS device comprising oscillations measurements means
- Patent Title (中): 包括振荡测量装置的MEMS装置
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Application No.: US13002378Application Date: 2009-06-21
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Publication No.: US08626468B2Publication Date: 2014-01-07
- Inventor: Ido Luft , Nir Goren
- Applicant: Ido Luft , Nir Goren
- Applicant Address: NL Amsterdam
- Assignee: STMicroelectronics International N.V.
- Current Assignee: STMicroelectronics International N.V.
- Current Assignee Address: NL Amsterdam
- Agency: Gardere Wynne Sewell LLP
- Priority: IL192583 20080702
- International Application: PCT/IL2009/000648 WO 20090621
- International Announcement: WO2010/001388 WO 20100107
- Main IPC: G02B26/08
- IPC: G02B26/08

Abstract:
A MEMS apparatus is provided for scanning an optical beam which comprises: a. at least one mirror operative to perform am oscillation motion to a pre-defined rotation angle around a mirror rotation axis; b. a sound sensing means; and c. a conversion means operative to convert sound vibrations detected by the sound sensing means into one or more electrical signals, and wherein the sound sensing means is located at the vicinity of the at least one mirror whereby the movement of the at least one mirror is sensed by the sound sensing means and converted by the conversion means into the one or more electrical signals characterizing the oscillating motion of the at least one mirror.
Public/Granted literature
- US20110181931A1 MEMS DEVICE COMPRISING OSCILLATIONS MEASUREMENTS MEANS Public/Granted day:2011-07-28
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