Invention Grant
US08627243B1 Methods for optimizing conductor patterns for ECP and CMP in semiconductor processing
有权
在半导体处理中优化ECP和CMP的导体图案的方法
- Patent Title: Methods for optimizing conductor patterns for ECP and CMP in semiconductor processing
- Patent Title (中): 在半导体处理中优化ECP和CMP的导体图案的方法
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Application No.: US13650783Application Date: 2012-10-12
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Publication No.: US08627243B1Publication Date: 2014-01-07
- Inventor: Chi-Feng Lin , Yu-Wei Chou , Wen-Cheng Huang , Cheng-I Huang , Ching-Hua Hsieh
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Slater & Matsil, L.L.P.
- Main IPC: G06F17/50
- IPC: G06F17/50 ; G06F19/00 ; G01R31/26 ; G01L21/00 ; G01N37/00 ; G01B7/26 ; G01B5/18 ; G01B11/22 ; G01B13/14 ; G06F11/30

Abstract:
Methods for optimizing conductor patterns for conductors formed by ECP and CMP processes. A method includes receiving layout data for an IC design where electrochemical plating (ECP) processes form patterned conductors in at least one metal layer over a semiconductor wafer; determining from the received layout data a global effects factor corresponding to a global pattern density; determining layout effects factors for unit grid areas corresponding to the pattern density of the at least one metal layer within the unit grid areas, determining local effects factors for each unit grid area; using a computing device, executing an ECP simulator using at least one of the global effects factor and the local effects factors, and using the layout effects factor; outputting an predicted post-ECP hump data map from the ECP simulator; and if indicated by a threshold comparison, modifying the layout data.
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