Invention Grant
US08631700B2 Resonating sensor with mechanical constraints 有权
谐振传感器具有机械约束

Resonating sensor with mechanical constraints
Abstract:
A method and apparatus for sensing movement resonates a primary member in a flexure mode at a given frequency, thus causing the primary member to have top and bottom portions that resonate at substantially about zero Hertz. The method also secures the bottom portion to a first substrate, and mechanically constrains the top portion while resonating in the flexure mode to substantially eliminate vibrations in the top portion. Finally, the method generates a changing capacitance signal in response to movement of the primary member. When generating this changing capacitance signal, the primary member resonates in a bulk mode at a given frequency.
Public/Granted literature
Information query
Patent Agency Ranking
0/0