Invention Grant
- Patent Title: Differential temperature and acceleration compensated pressure transducer
- Patent Title (中): 差压和加速补偿压力传感器
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Application No.: US12751482Application Date: 2010-03-31
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Publication No.: US08631707B2Publication Date: 2014-01-21
- Inventor: Anthony D. Kurtz , Alexander Ned , Sorin Stefanescu , Nora Kurtz
- Applicant: Anthony D. Kurtz , Alexander Ned , Sorin Stefanescu , Nora Kurtz
- Applicant Address: US NJ Leonia
- Assignee: Kulite Semiconductor Products, Inc.
- Current Assignee: Kulite Semiconductor Products, Inc.
- Current Assignee Address: US NJ Leonia
- Agency: Troutman Sanders LLP
- Agent James E. Schutz; Edward M. Roney
- Main IPC: G01L9/10
- IPC: G01L9/10 ; G01L15/00 ; G01L7/08

Abstract:
A dual diaphragm pressure transducer, or sensor, with compensation for non-pressure effects is disclosed. The pressure sensor can include two pressure transducers located on separate portions of a chip. The first pressure transducer can be a differential pressure transducer, which produces a signal proportional to one or more applied pressures and includes other non-pressure effects. The second pressure transducer can be sealed in a hermetic chamber and thus can produce a signal proportional only to non-pressure effects. The signals can be combined to produce a signal proportional to the applied pressures with no non-pressure effects. The first and second pressure transducers can be physically and/or electrically isolated to improve sealing between the two pressure transducers and prevent pressure leaks therebetween.
Public/Granted literature
- US20110239772A1 DIFFERENTIAL TEMPERATURE AND ACCELERATION COMPENSATED PRESSURE TRANSDUCER Public/Granted day:2011-10-06
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