Invention Grant
- Patent Title: Mask frame assembly for thin-film deposition
- Patent Title (中): 用于薄膜沉积的面罩框架组件
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Application No.: US13430874Application Date: 2012-03-27
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Publication No.: US08631761B2Publication Date: 2014-01-21
- Inventor: Taek-Kyo Kang
- Applicant: Taek-Kyo Kang
- Applicant Address: KR Yongin, Gyeonggi-do
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin, Gyeonggi-do
- Agency: Lee & Morse, P.C.
- Priority: KR10-2011-0060229 20110621
- Main IPC: C23C16/00
- IPC: C23C16/00
Abstract:
Provided is a mask frame assembly for thin-film deposition. The mask frame assembly including a mask frame having an opening defined therethrough, the mask frame configured to retain a mask, at least one supporter configured to contact the mask for supporting the mask, and a fixing unit coupled to the supporter and the mask frame.
Public/Granted literature
- US20120325143A1 MASK FRAME ASSEMBLY FOR THIN-FILM DEPOSITION Public/Granted day:2012-12-27
Information query
IPC分类:
