Invention Grant
- Patent Title: Liquid ejecting head, liquid ejecting apparatus, piezoelectric element, and method for evaluating piezoelectric layer
- Patent Title (中): 液体喷射头，液体喷射装置，压电元件和压电层评估方法
-
Application No.: US13763766Application Date: 2013-02-11
-
Publication No.: US08632169B2Publication Date: 2014-01-21
- Inventor: Tetsuya Isshiki
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2012-028964 20120213
- Main IPC: B41J2/045
- IPC: B41J2/045 ; C04B35/495 ; H01L41/18 ; H01L41/187 ; C04B35/00
Abstract:
A liquid ejecting head includes a piezoelectric element including a piezoelectric layer made of a piezoelectric material and an electrode disposed on the piezoelectric layer. The piezoelectric material is such that when a diamond conical indenter having an angle α of 136° between opposite faces is pressed into the piezoelectric layer at a load of 5 gf for 5 seconds to form cracks extending from an indentation, using a micro Vickers hardness meter, the length of the cracks from four corners of the indentation is 15 μm or less.
Public/Granted literature
Information query
IPC分类:
