Invention Grant
- Patent Title: Positive-type photoresist composition
- Patent Title (中): 正型光致抗蚀剂组合物
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Application No.: US13884807Application Date: 2011-10-25
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Publication No.: US08632946B2Publication Date: 2014-01-21
- Inventor: Takakazu Kage , Norifumi Imaizumi
- Applicant: Takakazu Kage , Norifumi Imaizumi
- Applicant Address: JP Tokyo
- Assignee: DIC Corporation
- Current Assignee: DIC Corporation
- Current Assignee Address: JP Tokyo
- Agency: Edwards Wildman Palmer LLP
- Priority: JP2010-251760 20101110
- International Application: PCT/JP2011/074489 WO 20111025
- International Announcement: WO2012/063635 WO 20120518
- Main IPC: G03F7/039
- IPC: G03F7/039

Abstract:
Provided is a positive photoresist composition containing a cresol novolac resin (A) manufactured using m-cresol, p-cresol, and formaldehyde as essential raw materials and a novolac phenolic resin (B) manufactured using o-cresol, resorcinol, and formaldehyde as essential raw materials. This positive photoresist composition has high sensitivity and high heat resistance at the same time, which have so far been difficult to achieve at the same time, at a higher level and is suitable for use as a resist in, for example, the manufacture of semiconductor devices such as ICs and LSIs, which have required formation of finer patterns with the increasing packing density in recent years, the manufacture of displays such as LCDs, and the manufacture of printing plates.
Public/Granted literature
- US20130224655A1 POSITIVE-TYPE PHOTORESIST COMPOSITION Public/Granted day:2013-08-29
Information query
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