Invention Grant
US08633066B2 Thin film transistor with reduced edge slope angle, array substrate and having the thin film transistor and manufacturing method thereof 有权
具有降低边缘倾斜角的薄膜晶体管,阵列基板并具有薄膜晶体管及其制造方法

Thin film transistor with reduced edge slope angle, array substrate and having the thin film transistor and manufacturing method thereof
Abstract:
A thin film transistor is provided, which comprises at least an active layer, a source electrode and a drain electrode, wherein the source electrode and the drain electrode are located on the active layer and spaced apart from each other; a channel is defined in the active layer between the source electrode and the drain electrode; edges of the active layer are aligned with outer edges of the source electrode and the drain electrode, the outer edge of the source electrode is an edge of the source electrode opposite to the drain electrode, and the outer edge of the drain electrode is an edge of the drain electrode opposite to the source electrode. Also, a method of manufacturing a thin film transistor is provided.
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