Invention Grant
- Patent Title: Vertical transistor actuation
- Patent Title (中): 垂直晶体管驱动
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Application No.: US13401934Application Date: 2012-02-22
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Publication No.: US08633068B2Publication Date: 2014-01-21
- Inventor: Lee W. Tutt , Shelby F. Nelson
- Applicant: Lee W. Tutt , Shelby F. Nelson
- Applicant Address: US NY Rochester
- Assignee: Eastman Kodak Company
- Current Assignee: Eastman Kodak Company
- Current Assignee Address: US NY Rochester
- Agent William R. Zimmerli
- Main IPC: H01L21/20
- IPC: H01L21/20

Abstract:
A method of actuating a semiconductor device includes providing a transistor including a substrate and a first electrically conductive material layer stack positioned on the substrate. The first electrically conductive material layer stack includes a reentrant profile. A second electrically conductive material layer includes first and second discrete portions in contact with first and second portions of a semiconductor material layer that conforms to the reentrant profile and is in contact with an electrically insulating material layer that conforms to the reentrant profile. A voltage is applied between the first discrete portion and the second discrete portion of the second electrically conductive material layer. A voltage is applied to the first electrically conductive material layer stack to modulate a resistance between the first discrete portion and the second discrete portion of the second electrically conductive material layer.
Public/Granted literature
- US20130214845A1 VERTICAL TRANSISTOR ACTUATION Public/Granted day:2013-08-22
Information query
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