Invention Grant
- Patent Title: Die bonding method utilizing rotary wafer table
- Patent Title (中): 利用旋转晶片台的贴合方法
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Application No.: US13072869Application Date: 2011-03-28
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Publication No.: US08633089B2Publication Date: 2014-01-21
- Inventor: Man Chung Ng , Keung Chau
- Applicant: Man Chung Ng , Keung Chau
- Applicant Address: HK Hong Kong
- Assignee: ASM Assembly Automation Ltd
- Current Assignee: ASM Assembly Automation Ltd
- Current Assignee Address: HK Hong Kong
- Agency: Ostrolenk Faber LLP
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/30 ; H01L21/46 ; H01L21/66

Abstract:
An array of semiconductor components, comprising a first plurality of semiconductor components and a second plurality of semiconductor components held on a carrier, is bonded onto one or more substrates. The first plurality of semiconductor components is first located for pick-up by a transfer device, and each semiconductor component comprised in the first plurality of semiconductor components is picked up with the transfer device and is bonded onto a respective bonding position on the one or more substrates. After the first plurality of semiconductor components have been picked up and bonded, the carrier is rotated and the second plurality of semiconductor components is located for pick-up by the transfer device. Thereafter, each semiconductor component comprised in the second plurality of semiconductor components is picked up with the transfer device and is bonded onto a respective bonding position on the one or more substrates.
Public/Granted literature
- US20120252161A1 DIE BONDING METHOD UTILIZING ROTARY WAFER TABLE Public/Granted day:2012-10-04
Information query
IPC分类: