Invention Grant
- Patent Title: Laser processing apparatus and method
- Patent Title (中): 激光加工设备及方法
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Application No.: US12334429Application Date: 2008-12-12
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Publication No.: US08633421B2Publication Date: 2014-01-21
- Inventor: Do Young Yoon , Gi Lyong Na , Young Jin Jun
- Applicant: Do Young Yoon , Gi Lyong Na , Young Jin Jun
- Applicant Address: KR Suwon, Gyunggi-do
- Assignee: Samsung Electro-Mechanics Co., Ltd.
- Current Assignee: Samsung Electro-Mechanics Co., Ltd.
- Current Assignee Address: KR Suwon, Gyunggi-do
- Agency: McDermott Will & Emery LLP
- Priority: KR10-2008-0079453 20080813
- Main IPC: B23K26/00
- IPC: B23K26/00 ; B23K26/08

Abstract:
A laser processing apparatus includes a stage unit moving a substrate having a plurality of work sections along longitudinal and lateral axes and rotating the substrate at a predetermined angle about a rotational axis, a laser beam oscillating unit oscillating laser beams to process holes in the substrate, a camera unit taking and providing an image of each of the work sections, and a controller correcting a processing location data using the image taken by the camera unit to allow the laser oscillating unit and the scanner unit to accurately process the holes in the substrate.
Public/Granted literature
- US20100039680A1 LASER PROCESSING APPARATUS AND METHOD Public/Granted day:2010-02-18
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