Invention Grant
- Patent Title: MEMs-based cantilever energy harvester
- Patent Title (中): 基于MEMs的悬臂式能量收割机
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Application No.: US13680043Application Date: 2012-11-17
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Publication No.: US08633634B2Publication Date: 2014-01-21
- Inventor: Erika Fuentes-Fernandez , Pradeep Shah , Wardia Mechtaly-Debray , Bruce E. Gnade
- Applicant: The Board of Regents of the University of Texas System , Texas Micropower, Inc.
- Applicant Address: US TX Austin US TX Dallas
- Assignee: The Board of Regents of the University of Texas System,Texas Micropower, Inc.
- Current Assignee: The Board of Regents of the University of Texas System,Texas Micropower, Inc.
- Current Assignee Address: US TX Austin US TX Dallas
- Agency: Winstead PC
- Main IPC: H01L41/113
- IPC: H01L41/113 ; H01L41/083
Abstract:
The claimed invention is directed to integrated energy-harvesting piezoelectric cantilevers. The cantilevers are fabricated using sol-gel processing using a sacrificial poly-Si seeding layer. Improvements in film microstructure and electrical properties are realized by introducing a poly-Si seeding layer and by optimizing the poling process.
Public/Granted literature
- US20130140950A1 MEMS-BASED CANTILEVER ENERGY HARVESTER Public/Granted day:2013-06-06
Information query
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