Invention Grant
US08633638B2 Piezoelectric resonator element, piezoelectric resonator, and acceleration sensor for reducing vibration sensitivity in at least one axis
有权
压电谐振元件，压电谐振器和用于在至少一个轴上降低振动灵敏度的加速度传感器
- Patent Title: Piezoelectric resonator element, piezoelectric resonator, and acceleration sensor for reducing vibration sensitivity in at least one axis
- Patent Title (中): 压电谐振元件，压电谐振器和用于在至少一个轴上降低振动灵敏度的加速度传感器
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Application No.: US13784538Application Date: 2013-03-04
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Publication No.: US08633638B2Publication Date: 2014-01-21
- Inventor: Masayuki Kikushima
- Applicant: Seiko Epson Corporation
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oliff & Berridge, PLC
- Priority: JP2007-285890 20071102
- Main IPC: H03H9/19
- IPC: H03H9/19 ; H03H9/215
Abstract:
A piezoelectric resonator element includes: a resonating arm extending in a first direction and cantilever-supported; a base portion cantilever-supporting the resonating arm; and an excitation electrode allowing the resonating arm to perform flexural vibration in a second direction that is orthogonal to the first direction. In the piezoelectric resonator element, the resonating arm includes an adjusting part adjusting rigidity with respect to a bend in a third direction that is orthogonal to the first and second directions.
Public/Granted literature
- US20130181580A1 PIEZOELECTRIC RESONATOR ELEMENT, PIEZOELECTRIC RESONATOR, AND ACCELERATION SENSOR Public/Granted day:2013-07-18
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