Invention Grant
- Patent Title: Helium sensor
- Patent Title (中): 氦传感器
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Application No.: US12918948Application Date: 2009-02-25
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Publication No.: US08633704B2Publication Date: 2014-01-21
- Inventor: Werner Grosse Bley , Daniel Wetzig
- Applicant: Werner Grosse Bley , Daniel Wetzig
- Applicant Address: DE Cologne
- Assignee: Inficon GmbH
- Current Assignee: Inficon GmbH
- Current Assignee Address: DE Cologne
- Agency: Ohlandt, Greeley, Ruggiero & Perle, LLP
- Priority: DE102008011686 20080228
- International Application: PCT/EP2009/052225 WO 20090225
- International Announcement: WO2009/106543 WO 20090903
- Main IPC: G01N27/62
- IPC: G01N27/62

Abstract:
The helium sensor comprises a housing that encloses a detection chamber. A side of the housing is closed by a permeable wall that is selective for helium. In the detection chamber, there is located an ion getter pump comprising an anode, a cathode and a magnetic field. The cathode, or a cathode leg is made of beryllium. Beryllium has a low atomic mass, whereby the likewise light-weight helium ions can be better incorporated into the cathode material.
Public/Granted literature
- US20110018545A1 HELIUM SENSOR Public/Granted day:2011-01-27
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