Invention Grant
- Patent Title: Method and apparatus for optically inspecting a magnetic disk
- Patent Title (中): 用于光学检查磁盘的方法和装置
-
Application No.: US13757119Application Date: 2013-02-01
-
Publication No.: US08634070B2Publication Date: 2014-01-21
- Inventor: Ayumu Ishihara
- Applicant: Hitachi High-Technologies Corporation
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Technologies Corporation
- Current Assignee: Hitachi High-Technologies Corporation
- Current Assignee Address: JP Tokyo
- Agency: Mattingly & Malur, PC
- Priority: JP2012-079606 20120330
- Main IPC: G01N21/00
- IPC: G01N21/00

Abstract:
In a method and apparatus for optically inspecting a magnetic disk, irradiating the surface of the sample with a light by rotating and moving the sample in the direction orthogonal to the center axis of the rotation, detecting the regular reflection light from the surface of the sample, detecting the scattered light in the vicinity of the regular reflection light from the surface of the sample by separating the scattered light from the regular reflection light, detecting the scattered light scattered in the direction at a higher angle with respect to the normal direction of the surface of the sample, and detecting the defects by processing the detection signal of the regular reflection light, the detection signal of the scattered light in the vicinity of the regular reflection light, and the detection signal of the scattered light in the high angle direction.
Public/Granted literature
- US20130258325A1 METHOD AND APPARATUS FOR OPTICALLY INSPECTING A MAGNETIC DISK Public/Granted day:2013-10-03
Information query