Invention Grant
US08634121B2 Mirror device, mirror array, optical switch, mirror device manufacturing method, and mirror substrate manufacturing method
有权
镜面装置，镜面阵列，光学开关，镜面装置的制造方法以及镜面基板的制造方法
- Patent Title: Mirror device, mirror array, optical switch, mirror device manufacturing method, and mirror substrate manufacturing method
- Patent Title (中): 镜面装置，镜面阵列，光学开关，镜面装置的制造方法以及镜面基板的制造方法
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Application No.: US13412510Application Date: 2012-03-05
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Publication No.: US08634121B2Publication Date: 2014-01-21
- Inventor: Fusao Shimokawa , Shingo Uchiyama , Johji Yamaguchi , Makoto Sato , Kunihiko Sasakura , Hirofumi Morita , Shuichiro Inagaki , Katsuyuki Machida , Hiromu Ishii , Makoto Murakami
- Applicant: Fusao Shimokawa , Shingo Uchiyama , Johji Yamaguchi , Makoto Sato , Kunihiko Sasakura , Hirofumi Morita , Shuichiro Inagaki , Katsuyuki Machida , Hiromu Ishii , Makoto Murakami
- Applicant Address: JP Tokyo
- Assignee: Nippon Telegraph and Telephone Corporation
- Current Assignee: Nippon Telegraph and Telephone Corporation
- Current Assignee Address: JP Tokyo
- Agency: Blakely Sokoloff Taylor & Zafman
- Priority: JP2005-000667 20050105; JP2005-005173 20050112; JP2005-005174 20050112; JP2005-005176 20050112; JP2005-005177 20050112; JP2005-010205 20050118; JP2005-013743 20050121; JP2005-014752 20050121; JP2005-014757 20050121; JP2005-014762 20050121; JP2005-016561 20050125; JP2005-016564 20050125; JP2005-016572 20050125; JP2005-055494 20050301; JP2005-072477 20050315
- Main IPC: G02B26/08
- IPC: G02B26/08
Abstract:
A mirror device includes a mirror (153) which is supported to be pivotable with respect to a mirror substrate (151), a driving electrode (103-1-103-4) which is formed on an electrode substrate (101) facing the mirror substrate, and an antistatic structure (106) which is arranged in a space between the mirror and the electrode substrate. This structure can fix the potential of the lower surface of the mirror and suppress drift of the mirror by applying a second potential to the antistatic structure.
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