Invention Grant
- Patent Title: Wafer center finding with kalman filter
- Patent Title (中): 晶圆中心发现与卡尔曼滤波器
-
Application No.: US13617333Application Date: 2012-09-14
-
Publication No.: US08634633B2Publication Date: 2014-01-21
- Inventor: Christopher C Kiley , Peter van der Meulen , Forrest T Buzan , Paul E. Fogel
- Applicant: Christopher C Kiley , Peter van der Meulen , Forrest T Buzan , Paul E. Fogel
- Applicant Address: US MA Chelmsford
- Assignee: Brooks Automation, Inc.
- Current Assignee: Brooks Automation, Inc.
- Current Assignee Address: US MA Chelmsford
- Agency: Perman & Green, LLP
- Agent Colin C. Durham
- Main IPC: G06K9/00
- IPC: G06K9/00
Abstract:
A device is provided having a robotic arm for handling a wafer, the robotic arm including one or more encoders that provide encoder data identifying a position of one or more components of the robotic arm. The device also having a processor adapted to apply an extended Kalman Filter to the encoder data to estimate a position of the wafer.
Public/Granted literature
- US20130085595A1 WAFER CENTER FINDING WITH KALMAN FILTER Public/Granted day:2013-04-04
Information query
