Invention Grant
US08635710B2 Scanning probe microscope and method of observing sample using the same
有权
扫描探针显微镜及使用其的观察样品的方法
- Patent Title: Scanning probe microscope and method of observing sample using the same
- Patent Title (中): 扫描探针显微镜及使用其的观察样品的方法
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Application No.: US13446279Application Date: 2012-04-13
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Publication No.: US08635710B2Publication Date: 2014-01-21
- Inventor: Toshihiko Nakata , Masahiro Watanabe , Takashi Inoue , Kishio Hidaka , Makoto Okai , Toshiaki Morita , Motoyuki Hirooka
- Applicant: Toshihiko Nakata , Masahiro Watanabe , Takashi Inoue , Kishio Hidaka , Makoto Okai , Toshiaki Morita , Motoyuki Hirooka
- Applicant Address: JP Tokyo
- Assignee: Hitachi, Ltd.
- Current Assignee: Hitachi, Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Crowell & Moring LLP
- Priority: JP2008-054245 20080305; JP2008-252097 20080930
- Main IPC: G01B11/14
- IPC: G01B11/14 ; G01Q60/06
Abstract:
Optical information and topographic information of the surface of a sample are measured at a nanometer-order resolution and with high reproducibility without damaging a probe and the sample by combining a nanometer-order cylindrical structure with a nanometer-order microstructure to form a plasmon intensifying near-field probe having a nanometer-order optical resolution and by repeating approach/retreat of the probe to/from each measurement point on the sample at a low contact force.
Public/Granted literature
- US20120204297A1 Scanning Probe Microscope and Method of Observing Sample Using the Same Public/Granted day:2012-08-09
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