Invention Grant
- Patent Title: Surface measurement instrument and method
- Patent Title (中): 表面测量仪器及方法
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Application No.: US13124547Application Date: 2009-10-15
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Publication No.: US08635783B2Publication Date: 2014-01-28
- Inventor: Ivor McDonnell , Paul James Scott , Daniel Ian Mansfield
- Applicant: Ivor McDonnell , Paul James Scott , Daniel Ian Mansfield
- Applicant Address: GB Leicester
- Assignee: Taylor Hobson Limited
- Current Assignee: Taylor Hobson Limited
- Current Assignee Address: GB Leicester
- Agency: RatnerPrestia
- Priority: GB0819087.8 20081017
- International Application: PCT/GB2009/051384 WO 20091015
- International Announcement: WO2010/043906 WO 20100422
- Main IPC: G01B5/004
- IPC: G01B5/004

Abstract:
A method of determining a correction parameter for use in effecting alignment of a component of a metrological apparatus in at least one direction is described which includes: positioning an artefact on a support surface of a turntable of the metrological apparatus so that a measurement surface of the artefact is asymmetric with respect to a rotation axis of the turntable in the at least one direction; using a measurement probe of the measurement instrument to make a first measurement of the measurement surface; rotating the turntable; using the measurement probe of the measurement instrument to make a second measurement of the measurement surface after rotation of the turntable; and determining a correction parameter from the first and second measurements.
Public/Granted literature
- US20110258867A1 SURFACE MEASUREMENT INSTRUMENT AND METHOD Public/Granted day:2011-10-27
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