Invention Grant
US08636668B2 Measuring apparatus 有权
测量装置

Measuring apparatus
Abstract:
Provided is a measuring apparatus that includes: a semiconductor laser device that emits a laser light beam to an object to be measured; a driving unit that provides a driving signal for modulation drive of the semiconductor laser device; a first detection unit that detects a first electrical signal that corresponds to the intensity of the laser light beam modulated due to the self-coupling effect, in a first half-cycle of the driving signal; a second detection unit that detects a second electrical signal that corresponds to the intensity of a second laser light beam modulated due to the self-coupling effect, in a second half-cycle of the driving signal being in an opposite phase of the first half-cycle; a calculation unit that calculates a difference between the first and second electrical signals; and a measuring unit that measures a change in the state of the object based on the calculated difference.
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