Invention Grant
- Patent Title: Method for producing semiconductor optical integrated device
- Patent Title (中): 半导体光集成器件的制造方法
-
Application No.: US13537221Application Date: 2012-06-29
-
Publication No.: US08637329B2Publication Date: 2014-01-28
- Inventor: Yoshihiro Yoneda , Hirohiko Kobayashi , Kenji Koyama , Masaki Yanagisawa , Kenji Hiratsuka
- Applicant: Yoshihiro Yoneda , Hirohiko Kobayashi , Kenji Koyama , Masaki Yanagisawa , Kenji Hiratsuka
- Applicant Address: JP Osaka
- Assignee: Sumitomo Electric Industries Ltd
- Current Assignee: Sumitomo Electric Industries Ltd
- Current Assignee Address: JP Osaka
- Agency: Smith, Gambrell & Russell, LLP
- Priority: JP2011-148491 20110704
- Main IPC: H01L21/027
- IPC: H01L21/027 ; H01L33/00

Abstract:
A method for producing a semiconductor optical integrated device includes the steps of forming a substrate product including first and second stacked semiconductor layer portions; forming a first mask on the first and second stacked semiconductor layer portions, the first mask including a stripe-shaped first pattern region and a second pattern region, the second pattern region including a first end edge; forming a stripe-shaped mesa structure; removing the second pattern region of the first mask; forming a second mask on the second stacked semiconductor layer portion; and selectively growing a buried semiconductor layer with the first and second masks. The second mask includes a second end edge separated from the first end edge of the first mask, the second end edge being located on the side of the second stacked semiconductor layer portion in the predetermined direction with respect to the first end edge of the first mask.
Public/Granted literature
- US20130012002A1 METHOD FOR PRODUCING SEMICONDUCTOR OPTICAL INTEGRATED DEVICE Public/Granted day:2013-01-10
Information query
IPC分类: