Invention Grant
- Patent Title: Method for producing integrated optical device
- Patent Title (中): 一体化光学元件的制造方法
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Application No.: US13740616Application Date: 2013-01-14
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Publication No.: US08637338B2Publication Date: 2014-01-28
- Inventor: Tomokazu Katsuyama , Kenji Hiratsuka
- Applicant: Sumitomo Electric Industries, Ltd.
- Applicant Address: JP Osaka
- Assignee: Sumitomo Electric Industries Ltd.
- Current Assignee: Sumitomo Electric Industries Ltd.
- Current Assignee Address: JP Osaka
- Agency: Smith, Gambrell & Russell, LLP
- Priority: JP2012-008032 20120118
- Main IPC: H01L33/00
- IPC: H01L33/00

Abstract:
A method for producing an integrated optical device includes the steps of growing, on a substrate including first and second regions, a first stacked semiconductor layer, a first cladding layer, and a side-etching layer; etching the first stacked semiconductor layer through a first etching mask formed on the first region; selectively growing, on the second region, a second stacked semiconductor layer and a second cladding layer; growing a third cladding layer and a contact layer on the first and second stacked semiconductor layers; and forming a ridge structure. The step of etching the first stacked semiconductor layer includes a step of forming an overhang between the first cladding layer and the first etching mask. The step of forming a ridge structure includes first, second, and third wet-etching steps in which the third cladding layer, the side-etching layer and the first and second cladding layers are selectively etched, respectively.
Public/Granted literature
- US20130183784A1 METHOD FOR PRODUCING INTEGRATED OPTICAL DEVICE Public/Granted day:2013-07-18
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