Invention Grant
- Patent Title: Method for producing an insulation layer between two electrodes
- Patent Title (中): 用于在两个电极之间制造绝缘层的方法
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Application No.: US13207056Application Date: 2011-08-10
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Publication No.: US08637367B2Publication Date: 2014-01-28
- Inventor: Martin Poelzl
- Applicant: Martin Poelzl
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Infineon Technologies AG Patent Department
- Priority: DE102010034116 20100812
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
Method for producing an insulation layer between a first electrode and a second electrode in a trench of a semiconductor body, wherein the method comprises the following features: providing a semiconductor body with a trench formed therein, wherein a first electrode is formed in a lower part of the trench, producing an insulation layer on the first electrode and at the sidewalls of the trench in an upper part of the trench in such a way that the insulation layer is formed in a U-shaped fashion in the trench, producing a protective layer on the insulation layer at least at the bottom of the remaining void in the trench, removing the insulation layer at the sidewalls of the trench in the upper part of the trench, removing the protective layer, producing a second electrode at least on the insulation layer above the first electrode.
Public/Granted literature
- US20120037979A1 METHOD FOR PRODUCING AN INSULATION LAYER BETWEEN TWO ELECTRODES Public/Granted day:2012-02-16
Information query
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