Invention Grant
- Patent Title: Blocking member for use in the diffraction plane of a TEM
- Patent Title (中): 用于TEM衍射平面的阻挡构件
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Application No.: US13168415Application Date: 2011-06-24
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Publication No.: US08637821B2Publication Date: 2014-01-28
- Inventor: Bart Buijsse , Peter Christiaan Tiemeijer
- Applicant: Bart Buijsse , Peter Christiaan Tiemeijer
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Agency: Scheinberg & Associates, PC
- Agent Michael O. Scheinberg
- Priority: EP10167258 20100624
- Main IPC: G01N23/00
- IPC: G01N23/00 ; G21K7/00

Abstract:
The invention relates to a blocking member to be placed in the diffraction plane of a TEM. It resembles the knife edge used for single sideband imaging, but blocks only electrons deflected over a small angle. As a result the Contrast Transfer Function of the TEM according to this invention will equal that of a single sideband microscope at low frequencies and that of a normal microscope for high frequencies. Preferable the highest frequency blocked by the blocking member is such that a microscope without the blocking member would show a CTF of 0.5.
Public/Granted literature
- US20110315876A1 Blocking Member for Use in the Diffraction Plane of a TEM Public/Granted day:2011-12-29
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