Invention Grant
- Patent Title: Drawing apparatus, method of manufacturing article, and processing apparatus
- Patent Title (中): 拉丝装置,制品的制造方法和加工装置
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Application No.: US13530225Application Date: 2012-06-22
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Publication No.: US08637835B2Publication Date: 2014-01-28
- Inventor: Yoshihiro Hirata
- Applicant: Yoshihiro Hirata
- Applicant Address: JP
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2011-141220 20110624
- Main IPC: G21K5/00
- IPC: G21K5/00 ; G03F7/20 ; H03F3/08

Abstract:
A drawing apparatus which performs drawing on a substrate with a plurality of charged particle beams includes: a blanking deflector located in a vacuum chamber and configured to blank each of the plurality of charged particle beams; a device located in an external chamber in which a gas pressure is higher than a gas pressure in the vacuum chamber, and configured to control the blanking deflector; and a first substrate facing the blanking deflector. The first substrate constitutes a partition which separates the vacuum chamber and the external chamber in a region, of the first substrate, facing the blanking deflector, and includes an electrode which fills a via formed in the region. The device is electrically connected to the blanking deflector via the electrode.
Public/Granted literature
- US20120328988A1 DRAWING APPARATUS, METHOD OF MANUFACTURING ARTICLE, AND PROCESSING APPARATUS Public/Granted day:2012-12-27
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