Invention Grant
- Patent Title: Adhesive sheet for producing semiconductor device
- Patent Title (中): 用于制造半导体器件的粘合片
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Application No.: US13473397Application Date: 2012-05-16
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Publication No.: US08638001B2Publication Date: 2014-01-28
- Inventor: Yuta Kimura , Yasushi Inoue , Takeshi Matsumura
- Applicant: Yuta Kimura , Yasushi Inoue , Takeshi Matsumura
- Applicant Address: JP Osaka
- Assignee: Nitto Denko Corporation
- Current Assignee: Nitto Denko Corporation
- Current Assignee Address: JP Osaka
- Agency: Knobbe Martens Olson & Bear LLP
- Priority: JP2011-110549 20110517
- Main IPC: H01L23/52
- IPC: H01L23/52 ; H01L23/48 ; H01L21/322

Abstract:
An object of the present invention is to provide an adhesive sheet that can capture cations mixed in from outside during various processes of manufacturing a semiconductor device to prevent deterioration in electrical characteristics of a semiconductor device to be manufactured and to improve product reliability. It is an adhesive sheet for producing a semiconductor device, in which when 2.5 g of the adhesive sheet is soaked in 50 ml of an aqueous solution containing 10 ppm of copper ions, and the solution is left at 120° C. for 20 hours, the concentration of copper ions in the aqueous solution is 0 to 9.9 ppm.
Public/Granted literature
- US20120295416A1 ADHESIVE SHEET FOR PRODUCING SEMICONDUCTOR DEVICE Public/Granted day:2012-11-22
Information query
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