Invention Grant
- Patent Title: Micromechanical resonating devices and related methods
- Patent Title (中): 微机械谐振装置及相关方法
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Application No.: US13330965Application Date: 2011-12-20
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Publication No.: US08638179B2Publication Date: 2014-01-28
- Inventor: Alexei Gaidarzhy , Pritiraj Mohanty
- Applicant: Alexei Gaidarzhy , Pritiraj Mohanty
- Applicant Address: US MA Cambridge
- Assignee: Sand 9, Inc.
- Current Assignee: Sand 9, Inc.
- Current Assignee Address: US MA Cambridge
- Agency: Wolf, Greenfield & Sacks, P.C.
- Main IPC: H03B5/30
- IPC: H03B5/30 ; H03H9/24 ; B81B5/00

Abstract:
Micromechanical resonating devices, as well as related methods, are described herein. The resonating devices can include a micromechanical resonating structure, an actuation structure that actuates the resonating structure, and a detection structure that detects motion of the resonating structure. A bias structure separated from the mechanical resonating structure is provided to tune a resonance frequency of the mechanical resonating structure.
Public/Granted literature
- US20120086306A1 MICROMECHANICAL RESONATING DEVICES AND RELATED METHODS Public/Granted day:2012-04-12
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