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US08638179B2 Micromechanical resonating devices and related methods 有权
微机械谐振装置及相关方法

Micromechanical resonating devices and related methods
Abstract:
Micromechanical resonating devices, as well as related methods, are described herein. The resonating devices can include a micromechanical resonating structure, an actuation structure that actuates the resonating structure, and a detection structure that detects motion of the resonating structure. A bias structure separated from the mechanical resonating structure is provided to tune a resonance frequency of the mechanical resonating structure.
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