Invention Grant
US08639367B2 Substrate processing system 有权
基板加工系统

Substrate processing system
Abstract:
Provided is a substrate processing system, which comprises a plurality of substrate processing apparatuses configured to process a substrate; and a group management apparatus configured to connect and manage the plurality of substrate processing apparatuses, wherein the group management apparatus includes: a communication part configured to transmit and receive data to and from the plurality of substrate processing apparatuses; a first storage part configured to store the data transmitted through the communication part from the plurality of substrate processing apparatuses; a second storage part configured to store a file prescribing a condition for determining an abnormality of the plurality of substrate processing apparatuses from the data; a display part including a manipulation screen for inputting the condition for determining the abnormality using the data stored in the first storage part or the file stored in the second storage part; a screen control part configured to control the display part to change an abnormality item selection screen displaying a plurality of abnormality items, one of which is to be selected into a registration screen for registering the condition corresponding to one of the plurality of abnormality items selected through the abnormality item selection screen; and a determination part configured to determine the abnormality of the plurality of substrate processing apparatuses by reading from the second storage part and analyzing the data stored in the first storage part based on the condition for determining the abnormality.
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