Invention Grant
- Patent Title: Substrate processing system
- Patent Title (中): 基板加工系统
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Application No.: US12873413Application Date: 2010-09-01
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Publication No.: US08639367B2Publication Date: 2014-01-28
- Inventor: Kazuhide Asai
- Applicant: Kazuhide Asai
- Applicant Address: JP Tokyo
- Assignee: Hitachi Kokusai Electric Inc.
- Current Assignee: Hitachi Kokusai Electric Inc.
- Current Assignee Address: JP Tokyo
- Agency: Brundidge & Stanger, P.C.
- Priority: JP2009-218709 20090924
- Main IPC: G05B13/02
- IPC: G05B13/02 ; G05B15/00 ; G05B23/02 ; G06F11/30 ; G06F19/00 ; G08B21/00 ; G08B23/00

Abstract:
Provided is a substrate processing system, which comprises a plurality of substrate processing apparatuses configured to process a substrate; and a group management apparatus configured to connect and manage the plurality of substrate processing apparatuses, wherein the group management apparatus includes: a communication part configured to transmit and receive data to and from the plurality of substrate processing apparatuses; a first storage part configured to store the data transmitted through the communication part from the plurality of substrate processing apparatuses; a second storage part configured to store a file prescribing a condition for determining an abnormality of the plurality of substrate processing apparatuses from the data; a display part including a manipulation screen for inputting the condition for determining the abnormality using the data stored in the first storage part or the file stored in the second storage part; a screen control part configured to control the display part to change an abnormality item selection screen displaying a plurality of abnormality items, one of which is to be selected into a registration screen for registering the condition corresponding to one of the plurality of abnormality items selected through the abnormality item selection screen; and a determination part configured to determine the abnormality of the plurality of substrate processing apparatuses by reading from the second storage part and analyzing the data stored in the first storage part based on the condition for determining the abnormality.
Public/Granted literature
- US20110071661A1 SUBSTRATE PROCESSING SYSTEM Public/Granted day:2011-03-24
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