Invention Grant
- Patent Title: Method of fabricating a compliant membrane probe
- Patent Title (中): 制造柔性膜探针的方法
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Application No.: US12631916Application Date: 2009-12-07
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Publication No.: US08640324B2Publication Date: 2014-02-04
- Inventor: David M. Audette , John F. Hagios , Christopher L. Sullivan
- Applicant: David M. Audette , John F. Hagios , Christopher L. Sullivan
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Michael LeStrange
- Main IPC: G01R31/28
- IPC: G01R31/28

Abstract:
A method for fabricating a compliant membrane probe for communication with an integrated circuit includes installing an array of conductive structures within a flexible membrane, the conductors comprising a beam structure having a first end and a second end, with each one of the conductors further comprising a probe tip extending from the first end, the probe tip having a throat generally surrounded by material of the flexible membrane and a head at an end of the throat such that the head is disposed at an opposite side of the flexible membrane with respect to the beam structure; and configuring the second end of the beam structure so as to be supported by a first end of the beam structure of an adjacent conductor thereto.
Public/Granted literature
- US20100083496A1 COMPLIANT MEMBRANE THIN FILM INTERPOSER PROBE FOR INTEGRATED CIRCUIT DEVICE TESTING Public/Granted day:2010-04-08
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