Invention Grant
- Patent Title: Vibrating element, vibrator, and electronic apparatus
- Patent Title (中): 振动元件，振动器和电子设备
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Application No.: US12984068Application Date: 2011-01-04
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Publication No.: US08640540B2Publication Date: 2014-02-04
- Inventor: Masahiro Oshio
- Applicant: Masahiro Oshio
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2010-000450 20100105; JP2010-241837 20101028
- Main IPC: G01P15/097
- IPC: G01P15/097 ; G01C19/24 ; G01P3/44
Abstract:
A vibrating element includes: a first support portion and a second support portion; a first vibrating arm which extends along a first axis, one end of the first vibrating arm being connected to the first support portion; a second vibrating arm which extends along the first axis, one end of the second vibrating arm being connected to the second support portion; an oscillating member which is sandwiched between the other ends of the first vibrating arm and the second vibrating arm, and has openings; and detection arms which extend along a second axis perpendicular to the first axis from the inner walls of the openings of the oscillating member in plan view.
Public/Granted literature
- US20110162450A1 VIBRATING ELEMENT, VIBRATOR, AND ELECTRONIC APPARATUS Public/Granted day:2011-07-07
Information query
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