Invention Grant
- Patent Title: Cantilever beam structural resonant-type integrated optical waveguide accelerometer
- Patent Title (中): 悬臂梁结构谐振型集成光波导加速度计
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Application No.: US13202755Application Date: 2009-09-23
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Publication No.: US08640542B2Publication Date: 2014-02-04
- Inventor: Tong Zhang , Xiaojun Xue , Xiaoyang Zhang , Pengqin Wu
- Applicant: Tong Zhang , Xiaojun Xue , Xiaoyang Zhang , Pengqin Wu
- Applicant Address: CN
- Assignee: Southeast University
- Current Assignee: Southeast University
- Current Assignee Address: CN
- Agency: Christie, Parker & Hale, LLP
- Priority: CN200910024475 20090223
- International Application: PCT/CN2009/074144 WO 20090923
- International Announcement: WO2010/094190 WO 20100826
- Main IPC: G01P15/08
- IPC: G01P15/08

Abstract:
A cantilever beam structural resonant-type integrated optical waveguide accelerometer, includes an input waveguide (1), a dissymmetrical structural Mach-Zehnder interferometer (2), a micro-mechanical vibration cantilever beam (3), a short curved waveguide (4) and an output waveguide (5); all the waveguide structures and the cantilever beam use the integrated optical micromachining technique, and the device single-scale integration can be realized by using the temperature-insensitive organic polymer optical waveguide structure and the organic polymer substrate, the key technique indexes such as detection sensitivity, dynamic range are extensively adjusted. The phase difference of the optical signal can be measured by detecting the optical intensity of the resonant frequency of the optical circuit so as to achieve high sensitive acceleration detection, and to be free from the effect of the ambient temperature disturbance and waveguide birefringence.
Public/Granted literature
- US20110303008A1 CANTILEVER BEAM STRUCTURAL RESONANT-TYPE INTEGRATED OPTICAL WAVEGUIDE ACCELEROMETER Public/Granted day:2011-12-15
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