Invention Grant
- Patent Title: Micro-electro-mechanical system device, out-of-plane sensor and method for making micro-electro-mechanical system device
- Patent Title (中): 微机电系统装置，平面外传感器及制造微机电系统装置的方法
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Application No.: US13451154Application Date: 2012-04-19
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Publication No.: US08640543B2Publication Date: 2014-02-04
- Inventor: Sheng Ta Lee , Chuan Wei Wang
- Applicant: Sheng Ta Lee , Chuan Wei Wang
- Applicant Address: TW Hsin-Chu
- Assignee: Pixart Imaging Incorporation
- Current Assignee: Pixart Imaging Incorporation
- Current Assignee Address: TW Hsin-Chu
- Agency: Tung & Associates
- Main IPC: G01P15/125
- IPC: G01P15/125
Abstract:
The present invention discloses a micro-electro-mechanical system (MEMS) device, comprising: a mass including a main body and two capacitor plates located at the two sides of the main body and connected with the main body, the two capacitor plates being at different elevation levels; an upper electrode located above one of the two capacitor plates, forming one capacitor therewith; and a lower electrode located below the other of the two capacitor plates, forming another capacitor therewith, wherein the upper and lower electrodes are misaligned with each other in a horizontal direction.
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