Invention Grant
- Patent Title: Strain gage and manufacturing method thereof
- Patent Title (中): 应变片及其制造方法
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Application No.: US13430994Application Date: 2012-03-27
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Publication No.: US08640549B2Publication Date: 2014-02-04
- Inventor: Dohaku Inamori
- Applicant: Dohaku Inamori
- Applicant Address: JP Nagano
- Assignee: Minebea Co., Ltd.
- Current Assignee: Minebea Co., Ltd.
- Current Assignee Address: JP Nagano
- Agency: Carrier Blackman & Associates, P.C.
- Agent Joseph P. Carrier; William D. Blackman
- Priority: JP2011-074333 20110330
- Main IPC: G01B7/16
- IPC: G01B7/16 ; G01L1/00
Abstract:
A strain gage includes a strain sensitive element; and a temperature compensation element, wherein the strain sensitive element and temperature compensation element are monolithically formed. A method of manufacturing the strain gage includes: exposing and developing a strain sensitive element pattern and the temperature compensation element pattern; and etching the strain sensitive element pattern and the temperature compensation element pattern.
Public/Granted literature
- US20120247220A1 STRAIN GAGE AND MANUFACTURING METHOD THEREOF Public/Granted day:2012-10-04
Information query
