Invention Grant
US08640731B2 Flow rate control device 有权
流量控制装置

  • Patent Title: Flow rate control device
  • Patent Title (中): 流量控制装置
  • Application No.: US12810362
    Application Date: 2009-01-07
  • Publication No.: US08640731B2
    Publication Date: 2014-02-04
  • Inventor: Junichi Isetani
  • Applicant: Junichi Isetani
  • Applicant Address: JP Tokyo
  • Assignee: Azbil Corporation
  • Current Assignee: Azbil Corporation
  • Current Assignee Address: JP Tokyo
  • Agency: Troutman Sanders LLP
  • Priority: JP2008-001166 20080108
  • International Application: PCT/JP2009/050080 WO 20090107
  • International Announcement: WO2009/088017 WO 20090716
  • Main IPC: F16K31/12
  • IPC: F16K31/12
Flow rate control device
Abstract:
A flow rate control device includes: a fuel gas supply channel having a flow rate adjusting valve; a thermal type mass flow rate sensor arranged in the supply channel; a calculation unit which calculates a thermal quantity flow rate of the fuel gas defined by a product of a volume flow rate of the fuel gas and a heat generation quantity per unit volume of the fuel gas according to an output from the thermal type sensor; and a flow rate control unit which controls the open degree of the flow rate adjusting valve according to a difference between a control target value for controlling the thermal quantity flow rate and the thermal quantity flow rate calculated by the calculation unit.
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