Invention Grant
- Patent Title: Securing mechanism and method for wafer bonder
- Patent Title (中): 晶圆接合机的固定机理及方法
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Application No.: US12898643Application Date: 2010-10-05
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Publication No.: US08640755B2Publication Date: 2014-02-04
- Inventor: Steve Canale , David J. Zapp
- Applicant: Steve Canale , David J. Zapp
- Applicant Address: US MA Woburn
- Assignee: Skyworks Solutions, Inc.
- Current Assignee: Skyworks Solutions, Inc.
- Current Assignee Address: US MA Woburn
- Agency: Knobbe, Martens, Olson & Bear, LLP
- Main IPC: B32B37/00
- IPC: B32B37/00

Abstract:
Disclosed are various features associated with a securing mechanism for a wafer bonder. In certain situations, operation of securing mechanisms can generate undesirable particles and debris, and some them can be introduced to a wafer being bonded. In certain implementations, a securing mechanism can be configured to reduce the likelihood of such particles and debris being introduced to the wafer.
Public/Granted literature
- US20120080132A1 SECURING MECHANISM AND METHOD FOR WAFER BONDER Public/Granted day:2012-04-05
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