Invention Grant
US08640755B2 Securing mechanism and method for wafer bonder 有权
晶圆接合机的固定机理及方法

Securing mechanism and method for wafer bonder
Abstract:
Disclosed are various features associated with a securing mechanism for a wafer bonder. In certain situations, operation of securing mechanisms can generate undesirable particles and debris, and some them can be introduced to a wafer being bonded. In certain implementations, a securing mechanism can be configured to reduce the likelihood of such particles and debris being introduced to the wafer.
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