Invention Grant
- Patent Title: Polishing composition for planarizing metal layer
- Patent Title (中): 用于平坦化金属层的抛光组合物
-
Application No.: US12482983Application Date: 2009-06-11
-
Publication No.: US08641920B2Publication Date: 2014-02-04
- Inventor: Song-Yuan Chang , Ming-Che Ho , Ming-hui Lu
- Applicant: Song-Yuan Chang , Ming-Che Ho , Ming-hui Lu
- Applicant Address: TW Zhongli
- Assignee: UWiZ Technology Co., Ltd.
- Current Assignee: UWiZ Technology Co., Ltd.
- Current Assignee Address: TW Zhongli
- Agency: Jackson IPG PLLC
- Priority: TW97151353A 20081230
- Main IPC: C09K13/00
- IPC: C09K13/00

Abstract:
A polishing composition of the present invention at least comprises about 750 ppm to less than 5000 ppm by weight of abrasive particles, hydrogen peroxide, an accelerator, a dual-corrosion inhibitor and water, wherein the dual-corrosion inhibitor contains a first and a second corrosion inhibitor. The dual-corrosion inhibitor is applied to the planarization of metal layers so as to maintain a high removal rate of metal layers as well as suppress etching of the metal, thus capable of reducing polishing defects such as dishing, erosion and the like.
Public/Granted literature
- US20100163784A1 Polishing Composition for Planarizing Metal Layer Public/Granted day:2010-07-01
Information query