A method for forming a soft mold includes providing a master mold having at least one pattern thereon, forming pre-polymer layer on the master mold, applying water on the pre-polymer layer, hardening the pre-polymer layer to form a soft mold, removing water, and separating the soft mold from the master mold. A method for forming a pattern comprises forming a resist on an etching subject layer, providing a soft mold, disposing the soft mold on the resist, separating the soft mold from the resist to form the resist pattern, and etching the etching subject layer by using the resist pattern, wherein providing the soft mold comprises providing a master mold having at least one pattern thereon, forming pre-polymer layer on the master mold, applying water on the pre-polymer layer, hardening the pre-polymer layer to form a soft mold, removing water, and separating the soft mold from the master mold.