Invention Grant
- Patent Title: System and method for depositing a material on a substrate
- Patent Title (中): 用于在基材上沉积材料的系统和方法
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Application No.: US13616170Application Date: 2012-09-14
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Publication No.: US08642125B2Publication Date: 2014-02-04
- Inventor: Ricky Charles Powell , Andrew Kelly Gray , Todd Alden Coleman
- Applicant: Ricky Charles Powell , Andrew Kelly Gray , Todd Alden Coleman
- Applicant Address: US OH Perrysburg
- Assignee: First Solar, Inc
- Current Assignee: First Solar, Inc
- Current Assignee Address: US OH Perrysburg
- Agency: Dickstein Shapiro LLP
- Main IPC: C23C16/448
- IPC: C23C16/448 ; C23C16/455

Abstract:
A method and apparatus for depositing a film on a substrate includes introducing a material and a carrier gas into a heated chamber. The material may be a semiconductor material, such as a cadmium chalcogenide. A resulting mixture of vapor and carrier gas containing no unvaporized material is provided. The mixture of vapor and carrier gas are remixed to achieve a uniform vapor/carrier gas composition, which is directed toward a surface of a substrate, such as a glass substrate, where the vapor is deposited as a uniform film.
Public/Granted literature
- US20130019953A1 SYSTEM AND METHOD FOR DEPOSITING A MATERIAL ON A SUBSTRATE Public/Granted day:2013-01-24
Information query
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