Invention Grant
US08642437B2 Gap-filling composition with excellent shelf life by end-capping
有权
间隙填充组合物，通过封端具有优良的保存期限
- Patent Title: Gap-filling composition with excellent shelf life by end-capping
- Patent Title (中): 间隙填充组合物，通过封端具有优良的保存期限
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Application No.: US12659908Application Date: 2010-03-25
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Publication No.: US08642437B2Publication Date: 2014-02-04
- Inventor: Chang Soo Woo , Hee Jae Kim , Sung Jae Lee , Sang Geun Yun , Tae Ho Kim
- Applicant: Chang Soo Woo , Hee Jae Kim , Sung Jae Lee , Sang Geun Yun , Tae Ho Kim
- Applicant Address: KR Gumi-si, Kyeongsangbuk-do
- Assignee: Cheil Industries, Inc.
- Current Assignee: Cheil Industries, Inc.
- Current Assignee Address: KR Gumi-si, Kyeongsangbuk-do
- Agency: Lee & Morse, P.C.
- Priority: KR10-2007-0099529 20071002
- Main IPC: H01L21/12
- IPC: H01L21/12 ; C08L83/06
Abstract:
A composition with improved shelf life for filling small gaps in a semiconductor device is provided. The composition comprises an end-capped silicone polymer. The molecular weight of the end-capped silicone polymer is not varied during storage. In addition, the dissolution rate (DR) of the composition in an alkaline developing solution is maintained at a desired level during storage. That is, the composition is highly stable during storage. Therefore, the composition is suitable for use in a node separation process for the fabrication of a semiconductor capacitor.
Public/Granted literature
- US20100190310A1 Gap-filling composition with excellent shelf life by end-capping Public/Granted day:2010-07-29
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