Invention Grant
- Patent Title: Active region patterning in double patterning processes
- Patent Title (中): 双重图案化工艺中的有源区域图案化
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Application No.: US12917205Application Date: 2010-11-01
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Publication No.: US08642451B2Publication Date: 2014-02-04
- Inventor: Feng-Ming Chang , Chang-Ta Yang , Huai-Ying Huang , Ping-Wei Wang , Hsiang-Lin Chen
- Applicant: Feng-Ming Chang , Chang-Ta Yang , Huai-Ying Huang , Ping-Wei Wang , Hsiang-Lin Chen
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Slater & Matsil, L.L.P.
- Main IPC: H01L21/20
- IPC: H01L21/20

Abstract:
A method includes forming an SRAM cell including a first and a second pull-up transistor and a first and a second pull-down transistor. The step of forming the SRAM cell includes forming a first and a second active region of the first and the second pull-up transistors using a first lithography mask, and forming a third and a fourth active region of the first and the second pull-down transistors using a second lithography mask.
Public/Granted literature
- US20120108036A1 Active Region Patterning in Double Patterning Processes Public/Granted day:2012-05-03
Information query
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