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US08642451B2 Active region patterning in double patterning processes 有权
双重图案化工艺中的有源区域图案化

Active region patterning in double patterning processes
Abstract:
A method includes forming an SRAM cell including a first and a second pull-up transistor and a first and a second pull-down transistor. The step of forming the SRAM cell includes forming a first and a second active region of the first and the second pull-up transistors using a first lithography mask, and forming a third and a fourth active region of the first and the second pull-down transistors using a second lithography mask.
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